Improved wafer isolation and additional flexibility

Single Wafer InterFace (SWIF) Pod
A front door opening technology integrating advanced materials (Polycarbonate base) and compatible with wafer handling standard

 

 




E103 compatible interfacing

Mechanical adaptation for 300nm E103 standard load port interfacing: INCAM Load Port Adapter (LPA)

Functions:

•To lift the FFO® up to door opening latch key
•FOUP front side emulator
•Correct position sensor pad activation

Use modes:

•Resident adaptator : LPA remains on the equipment
•Nomad adaptator: LPA brought simultaneously with carriers

Compatible load ports:

ASYST Technologies, RECIF, RORZE, BROOKS Automation

SEMI E103
Recommendations for integration to SEMI E103 specified equipment
FFO® on sorter Video

Universal Load Port

New generation universal load port that accomodates either FOUP or FFO® without any accessories.


Functions:

•All FOUP loadport function
• FFO® elevator
•Cat door to open FFO® small door

Universal load port with FOUP

Universal load port with FFO®
  

Universal load port elevator