The
Swifter is a user-friendly system for single-wafer handling of
hand-carry (rush, monitor, test, engineering, send-head, or rework)
lots in automated batch-wafer production lines. The unit is a
small-footprint cart filled with one loadport adapter and up to
four of the company's FOUP-for-One single-wafer pods. The integrated
system enables rapid delivery of 300-mm wafers anywhere without
the use of an automated batch delivery system, allowing final
users to cut cycle times of hot lots, metrology wafers, and calibration
wafers. The SEMI E103-compliant system can extract or return wafers
from any 300-mm wafer sorter or process tool. (Semicon West,
S.F., Gateway, Booth 3125)
The
Swifter is a user-friendly system for single-wafer handling of
hand-carry (rush, monitor, test, engineering, send-head, or rework)
lots in automated batch-wafer production lines. The unit is a
small-footprint cart filled with one loadport adapter and up to
four of the company's FOUP-for-One single-wafer pods. The integrated
system enables rapid delivery of 300-mm wafers anywhere without
the use of an automated batch delivery system, allowing final
users to cut cycle times of hot lots, metrology wafers, and calibration
wafers. The SEMI E103-compliant system can extract or return wafers
from any 300-mm wafer sorter or process tool. (Semicon West,
S.F., Gateway, Booth 3125)